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Reactive-ion etching
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#	Item
91	MEMS SPIEV2-White paper-2009-Final version Add to Reading List Source URL: www.compoundsemiconductor.net Language: English - Date: 2012-07-24 15:04:42 Technology Etching Reactive-ion etching Microelectromechanical systems Deep reactive-ion etching Black silicon Glass etching Isotropic etching Wafer Semiconductor device fabrication Materials science Microtechnology
92	Large-scale spore extraction unit (MycoHarvester Mk III) MycoHarvesters are a range of devices designed to harvest fungal spores safely and efficiently from solid substrates (e.g. grains such as rice, inoculated with beneficial Add to Reading List Source URL: www.dropdata.net Language: English - Date: 2011-06-11 10:37:20 Biology Metarhizium anisopliae Metarhizium 1 micrometre Conidium Cyclonic separation Deep reactive-ion etching Pollution Hypocreales Technology
93	Surface Micromachining for Microelectromechanical Systems JAMES M. BUSTILLO, ROGER T. HOWE, FELLOW, IEEE, AND Add to Reading List Source URL: www.ee.nthu.edu.tw Language: English - Date: 2004-02-25 03:13:04 Semiconductor device fabrication Nanotechnology Microelectromechanical systems Surface micromachining Polycrystalline silicon Chemical vapor deposition Bulk micromachining Epitaxy Deep reactive-ion etching Materials science Microtechnology Technology
94	PDF Document Add to Reading List Source URL: www.seconsemi.com Language: English - Date: 2004-10-29 08:46:33 Technology Etching Wafer Thermal oxidation Isotropic etching LOCOS Microelectromechanical systems Deep reactive-ion etching Materials science Microtechnology Semiconductor device fabrication
95	PDF Document Add to Reading List Source URL: www.mycoharvester.info Language: English - Date: 2012-04-07 11:57:22 Technology Metarhizium 1 micrometre Conidium Cyclonic separation Deep reactive-ion etching Hypocreales Pollution Biology
96	PDF Document Add to Reading List Source URL: braungroup.beckman.illinois.edu Language: English - Date: 2012-04-17 15:04:17 Technology Etching Microelectromechanical systems Wafer RF MEMS Photoresist Integrated circuit Deep reactive-ion etching Nanoimprint lithography Materials science Semiconductor device fabrication Microtechnology